The calibration reference is a 5mm x 5mm silicon die with the calibration region situated at the center of the chip. The structure step height is in the range of 100nm with the exact value for each chip indicated on the box label. Arrays of structures with different shape and pitch are integrated on the chip.
The larger square (1mm x 1mm) contains square pillars and holes with a 10µm pitch. The smaller square (500µm x 500µm) contains circular pillars and holes as well as lines in the X- and Y-direction with a 5µm pitch. The die is mounted on a 15mm steel disk. Used for AFM scanner calibration (XYZ).
5mm x 5mm Silicon die
Step height - 100nm nominal (exact value indicated on box label)
Structures
Center 1mm region - circular pillars and holes - 10um pitch
Concentric 5um region - circular pillars and holes with additional X-Y lines - 5 um pitch
PRODUCTS
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