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AMU AIR VANE 5 TURN COIL ASY

AIR VANE VAC RIE/PECVD AMU

ID 94-MA00A19400

¥ 2,090,850

In Stock 1

SIGHT GLASS

LEP TOP CHAMBER SIGHT GLASS

ID 94-MD81D16402

¥ 11,165

In Stock 1

CATHODE TI FBN

ION SOURCE FILAMENT

ID 94-G-MD31C39373

¥ 171,285

In Stock 1

BLADE FOR G/VAC/VLV/940

BLADE FOR MONOVAT SEAL KIT VITON 50X336 02112-BA24

ID 94-G-VAC-VLV-941

¥ 227,711

In Stock 1

MKS 640 PRES.CTRL 50TORR

He 640 PRESSURE CONTROLLER 50TORR

ID 94-L-MTR-PRE-002

¥ 433,805

In Stock 1

Vacuum Capacitor AMU

Upgrading to latest AMU will include a firmware update and replacement of all parts. There will be a reduction in system failures, resulting in a decrease in cost of overall ownership of the system.

The Vac cap AMU design has eliminated any arching possibility and will improve MTBF for air vane configured tools.

ID 94-KT1011727

N/A

BELLOWS WELD ASSEMBLY

PINLIFT BELLOWS WELDED ASSEMBLY

ID 94-G-MA91D29176

¥ 250,712

In Stock 1

PCB AMU Control Assembly

PCB FOR AMU CONTROL PANEL

ID 94-MA00Z26876

¥ 153,900

In Stock 1

FILTER UV/RF

Filter for chamber viewpoints

ID 94-MD81D14211

¥ 14,100

In Stock 1

PIN WELDED ASY (EWBS)

VACUUM BELLOWS FOR WAFER CLAMP ASSEMBLY

ID 94-G-MA91D31644

¥ 201,768

In Stock 1

PSU 24V/+15V/-15V

LAMBDA POWER SUPPLY UNIT - 24V/+15V/-15V

ID 94-EXP1524

¥ 113,528

In Stock 2

H5 Thermal (10L) Fluid

Thermal bath fluids have been carefully selected and proven in long-term service. They are suited for use with heated and refrigerated circulators.

ID 94-G-WTR-SUN-903

¥ 264,225

In Stock 1

BEARING GUIDE RND SHAFT

ION BEAM PLATEN CLAMP BEARINGS

ID 94-MA31C25229

¥ 282,876

In Stock 2

FILAMENT HPN

ION SOURCE FILAMENT

ID 94-MA00D27078

¥ 9,188

In Stock 1

SHOWERHEAD RIE STD

STANDARD RIE SHOWERHEAD

ID 94-MD84A16659

¥ 351,855

In Stock 1

GGE ACT INVERT MAG AIM-S-NW25

PENNING GAUGE

ID 94-G-VAC-GGE-004

¥ 163,592

In Stock 1

WAFER CLAMP 8 INCH QUARTZ

6" WAFER CLAMP FULL LIP

ID 94-MD91B25976

¥ 527,783

In Stock 1

TUBE ALUMINA ICP65

ICP 65 TUBE

ID 94-MD00C26550

¥ 301,106

In Stock 1

SAFETY RELAY RT9 24V DC COIL

24V SAFETY RELAY

ID 94-G-ESR6010

¥ 74,122

In Stock 1

SLIP RING SET

SLIP RING PCB AND CONTACTS

ID 94-G-SUN-ASY-002SP

¥ 406,000

In Stock 1

O'RING BS112 VIT 2.62x12.37MM

O'RING FOR ELECTRODE LEGS

ID 94-G-SEL-O-V-112

¥ 150

In Stock 2

WAFER CLAMP 4 INCH QUARTZ

4" WAFER CLAMP FULL LIP

ID 94-MD91B25973

¥ 483,736

In Stock 1

BELLOWS WELD ASSEMBLY

VACUUM BELLOW ASSEMBLY FOR PINLIFT

ID 94-MA91C19809

¥ 259,700

In Stock 1

PLG TABLE TOP ELECTR LWR

Electrode coverplate plugs

ID 94-G-MD40511

¥ 4,827

In Stock 8

PTN-460-GR-08-20x77-RT

GRAPHITE PLATEN 20X 77MM RECESES

ID 94-G-MD84B36562

¥ 298,665

In Stock 1

GLASS WINDOW 51x6MM THK PYREX

CHAMBER VIEWPORT

ID 94-M-0651D-01

¥ 414

In Stock 1

Thermal G Bath Fluid (10 Ltr)

JULABO Thermal G is a bath fluid based on water-glycol and features excellent thermal properties. 30...+80°C Working Temperature. In addition, JULABO Thermal G supplies anti-freeze protection and thus it is most suitable for applications below the freezing point of water.

ID 94-G-WTR-SUN-909

¥ 50,445

In Stock 1