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Vacuum Capacitor AMU product photo
Vacuum Capacitor AMU
 
Upgrading to latest AMU will include a firmware update and replacement of all parts. There will be a reduction in system failures, resulting in a decrease in cost of overall ownership of the system.

The Vac cap AMU design has eliminated any arching possibility and will improve MTBF for air vane configured tools.
ID 94-KT1011727
For availability and prices please request a quote.
AMU AIR VANE 5 TURN COIL ASY product photo
AMU AIR VANE 5 TURN COIL ASY

AIR VANE VAC RIE/PECVD AMU
ID 94-MA00A19400
$ 8,656.77
In Stock 1
PCB AMU CONTROL ASSY. product photo
PCB AMU CONTROL ASSY.
PCB FOR AMU CONTROL PANEL
ID 94-MA00Z26876
$ 1,018.95
In Stock 1
AMU VAC CAP ASY product photo
AMU VAC CAP ASY
VAC CAP RIE/PECVD AMU
ID 94-MA00A23771
$ 17,395.13
In Stock 1

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