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PLASMA TECHNOLOGY

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MKS 640 PRES.CTRL 50TORR product photo
MKS 640 PRES.CTRL 50TORR
He 640 PRESSURE CONTROLLER 50TORR
ID 94-L-MTR-PRE-002
$ 2,995.00
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Vacuum Capacitor AMU product photo
Vacuum Capacitor AMU
 
Upgrading to latest AMU will include a firmware update and replacement of all parts. There will be a reduction in system failures, resulting in a decrease in cost of overall ownership of the system.

The Vac cap AMU design has eliminated any arching possibility and will improve MTBF for air vane configured tools.
ID 94-KT1011727
For availability and prices please request a quote.
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BELLOWS WELD ASSEMBLY product photo
BELLOWS WELD ASSEMBLY

PINLIFT BELLOWS WELDED ASSEMBLY


ID 94-G-MA91D29176
$ 1,730.46
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AMU AIR VANE 5 TURN COIL ASY product photo
AMU AIR VANE 5 TURN COIL ASY

AIR VANE VAC RIE/PECVD AMU
ID 94-MA00A19400
$ 19,514.60
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FILTER UV/RF product photo
FILTER UV/RF

Filter for chamber viewpoints



ID 94-MD81D14211
$ 107.34
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PSU 24V/+15V/-15V product photo
PSU 24V/+15V/-15V

LAMBDA POWER SUPPLY UNIT  - 24V/+15V/-15V


ID 94-EXP1524
$ 783.60
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H5 Thermal (10L) Fluid product photo
H5 Thermal (10L) Fluid

Thermal bath fluids have been carefully selected and proven in long-term service. They are suited for use with heated and refrigerated circulators.

ID 94-G-WTR-SUN-903
$ 1,823.72
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BEARING GUIDE RND SHAFT product photo
BEARING GUIDE RND SHAFT
ION BEAM PLATEN CLAMP BEARINGS
ID 94-MA31C25229
$ 1,952.46
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FILAMENT HPN product photo
FILAMENT HPN

ION SOURCE FILAMENT
ID 94-MA00D27078
$ 63.42
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SHOWERHEAD RIE STD product photo
SHOWERHEAD RIE STD
STANDARD RIE SHOWERHEAD
ID 94-MD84A16659
$ 2,428.57
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TUBE ALUMINA ICP65 product photo
TUBE ALUMINA ICP65
ICP 65 TUBE
ID 94-MD00C26550
$ 2,078.29
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O'RING BS112 VIT 2.62x12.37MM product photo
O'RING BS112 VIT 2.62x12.37MM
O'RING FOR ELECTRODE LEGS
ID 94-G-SEL-O-V-112
$ 1.40
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PLG TABLE TOP ELECTR LWR product photo
PLG TABLE TOP ELECTR LWR
Electrode coverplate plugs
ID 94-G-MD40511
$ 45.05
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GLASS WINDOW 51x6MM THK PYREX product photo
GLASS WINDOW 51x6MM THK PYREX

CHAMBER VIEWPORT
ID 94-M-0651D-01
$ 3.86
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Thermal G Bath Fluid (10 Ltr) product photo
Thermal G Bath Fluid (10 Ltr)

JULABO Thermal G is a bath fluid based on water-glycol and features excellent thermal properties. 30...+80°C Working Temperature. In addition, JULABO Thermal G supplies anti-freeze protection and thus it is most suitable for applications below the freezing point of water.

ID 94-G-WTR-SUN-909
$ 470.82
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WAFER CLAMP 6 INCH QUARTZ product photo
WAFER CLAMP 6 INCH QUARTZ
WAFER CLAMP 6" QUARTZ SERIES ll
ID 94-MD91B25974
$ 2,942.29
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SEAL KIT FOR G/VAC/VLV/930 product photo
SEAL KIT FOR G/VAC/VLV/930
BLADE FOR MONOVAT SEAL KIT VITON 46x236 02010-BA24
ID 94-G-VAC-VLV-932
$ 1,330.20
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O'RING BS472 VIT 6.99x582.68MM product photo
O'RING BS472 VIT 6.99x582.68MM
O'RING FOR ELECTRODE
ID 94-G-SEL-O-V-472C
$ 71.02
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SIGHT GLASS product photo
SIGHT GLASS
LEP TOP CHAMBER SIGHT GLASS
ID 94-MD81D16402
$ 84.95
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Blade for G/VAC/VLV/940 product photo
Blade for G/VAC/VLV/940

BLADE FOR MONOVAT SEAL KIT VITON 50X336 02112-BA24

ID 94-G-VAC-VLV-941
$ 1,571.17
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CATHODE TI FBN product photo
CATHODE TI FBN
ION SOURCE FILAMENT
ID 94-G-MD31C39373
$ 1,182.24
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PCB AMU Control Assembly product photo
PCB AMU Control Assembly
PCB FOR AMU CONTROL PANEL
ID 94-MA00Z26876
$ 1,436.40
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PIN WELDED ASY (EWBS) product photo
PIN WELDED ASY (EWBS)
VACUUM BELLOWS FOR WAFER CLAMP ASSEMBLY
ID 94-G-MA91D31644
$ 1,392.64
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WAFER CLAMP 8 INCH QUARTZ product photo
WAFER CLAMP 8 INCH QUARTZ
6" WAFER CLAMP FULL LIP
ID 94-MD91B25976
$ 3,642.85
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SLIP RING SET product photo
SLIP RING SET
SLIP RING PCB AND CONTACTS
ID 94-G-SUN-ASY-002SP
$ 2,802.00
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WAFER CLAMP 4 INCH QUARTZ product photo
WAFER CLAMP 4 INCH QUARTZ
4" WAFER CLAMP FULL LIP
ID 94-MD91B25973
$ 3,338.83
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BELLOWS WELD ASSEMBLY product photo
BELLOWS WELD ASSEMBLY

VACUUM BELLOW ASSEMBLY FOR PINLIFT

ID 94-MA91C19809
$ 1,792.56
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PTN-460-GR-08-20x77-RT product photo
PTN-460-GR-08-20x77-RT
GRAPHITE PLATEN 20X 77MM RECESES
ID 94-G-MD84B36562
$ 2,061.43
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AMU VAC CAP ASY product photo
AMU VAC CAP ASY
VAC CAP RIE/PECVD AMU
ID 94-MA00A23771
$ 22,117.41
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VLV CONTR LN2 product photo
VLV CONTR LN2
LN2 CONTROL VALVE
ID 94-GVV0560
$ 1,283.60
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MOTOR/GEARBOX ASY product photo
MOTOR/GEARBOX ASY
AMU CAPACITOR DRIVE MOTOR/GEARBOX
ID 94-MA00D23738
$ 2,469.66
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