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MKS 640 PRES.CTRL 50TORR product photo
MKS 640 PRES.CTRL 50TORR
He 640 PRESSURE CONTROLLER 50TORR
ID 94-L-MTR-PRE-002
$ 3,534.01
In Stock 1
Vacuum Capacitor AMU product photo
Vacuum Capacitor AMU
 
Upgrading to latest AMU will include a firmware update and replacement of all parts. There will be a reduction in system failures, resulting in a decrease in cost of overall ownership of the system.

The Vac cap AMU design has eliminated any arching possibility and will improve MTBF for air vane configured tools.
ID 94-KT1011727
For availability and prices please request a quote.
BELLOWS WELD ASY product photo
BELLOWS WELD ASY

8" WAFER CLAMP FULL LIP


ID 94-G-MA91D29176
$ 1,602.38
Out of stock
AMU AIR VANE 5 TURN COIL ASY product photo
AMU AIR VANE 5 TURN COIL ASY

AIR VANE VAC RIE/PECVD AMU
ID 94-MA00A19400
$ 8,656.77
In Stock 1
FILTER UV/RF product photo
FILTER UV/RF

FILTER FOR CHAMBER VIEWPORTS



ID 94-MD81D14211
$ 68.17
In Stock 1
PSU 24V/+15V/-15V product photo
PSU 24V/+15V/-15V

LAMBDA POWER SUPPLY

24V/+15V/-15V




ID 94-EXP1524
$ 812.77
In Stock 1
FLUID H5 THERMAL 10L product photo
FLUID H5 THERMAL 10L

VACUUM BELLOW ASSEMBLYFOR PINLIFT
ID 94-G-WTR-SUN-903
$ 1,583.23
In Stock 1
BEARING GUIDE RND SHAFT product photo
BEARING GUIDE RND SHAFT
ION BEAM PLATEN CLAMP BEARINGS
ID 94-MA31C25229
$ 2,050.22
In Stock 2
FILAMENT HPN product photo
FILAMENT HPN

ION SOURCE FILAMENT
ID 94-MA00D27078
$ 2.37
In Stock 1
SHOWERHEAD RIE STD product photo
SHOWERHEAD RIE STD
STANDARD RIE SHOWERHEAD
ID 94-MD84A16659
$ 2,211.59
In Stock 1
GGE ACT INVERT MAG AIM-S-NW25 product photo
GGE ACT INVERT MAG AIM-S-NW25
PENNING GAUGE
ID 94-G-VAC-GGE-004
$ 1,322.40
In Stock 1
TUBE ALUMINA ICP65 product photo
TUBE ALUMINA ICP65
ICP 65 TUBE
ID 94-MD00C26550
$ 1,413.59
In Stock 1
O'RING BS112 VIT 2.62x12.37MM product photo
O'RING BS112 VIT 2.62x12.37MM
O'RING FOR ELECTRODE LEGS
ID 94-G-SEL-O-V-112
  • Summer Savings - Purchase any 3 products from Cryospares or Optical & Spectroscopy categories and save 15%
$ 0.55
In Stock 2
PLG TABLE TOP ELECTR LWR product photo
PLG TABLE TOP ELECTR LWR
ELECTRODE COVERPLATE PLUGS
ID 94-G-MD40511
$ 39.90
In Stock 8
GLASS WINDOW 51x6MM THK PYREX product photo
GLASS WINDOW 51x6MM THK PYREX

CHAMBER VIEWPORT
ID 94-M-0651D-01
$ 19.84
In Stock 1
FLUID THERMAL G 10 LTR product photo
FLUID THERMAL G 10 LTR
CHILLER FLUID
ID 94-G-WTR-SUN-909
$ 470.05
In Stock 1
HEXID A4 5 LTR product photo
HEXID A4 5 LTR
CHILLER FLUID
ID 94-G-WTR-SUN-007
$ 164.16
In Stock 1
WAFER CLAMP 6 INCH QUARTZ product photo
WAFER CLAMP 6 INCH QUARTZ
CONTACTS FOR IONBEAM PLATEN
ID 94-MD91B25974
$ 1,322.40
In Stock 1
SEAL KIT FOR G/VAC/VLV/930 product photo
SEAL KIT FOR G/VAC/VLV/930
BLADE FOR MONOVAT SEAL KIT VITON 46x236 02010-BA24
ID 94-G-VAC-VLV-932
$ 1,208.40
In Stock 1
O'RING BS472 VIT 6.99x582.68MM product photo
O'RING BS472 VIT 6.99x582.68MM
O'RING FOR ELECTRODE
ID 94-G-SEL-O-V-472C
  • Summer Savings - Purchase any 3 products from Cryospares or Optical & Spectroscopy categories and save 15%
$ 56.32
In Stock 2
SIGHT GLASS product photo
SIGHT GLASS
LEP TOP CHAMBER SIGHT GLASS
ID 94-MD81D16402
$ 114.00
In Stock 1
BLADE FOR G/VAC/VLV/940 product photo
BLADE FOR G/VAC/VLV/940
BLADE FOR MONOVAT SEAL KIT VITON 50X336 02112-BA24
ID 94-G-VAC-VLV-941
$ 1,276.80
In Stock 1
CATHODE TI FBN product photo
CATHODE TI FBN

ION SOURCE FILAMENT
ID 94-G-MD31C39373
$ 1,155.73
In Stock 1
PCB AMU CONTROL ASSY. product photo
PCB AMU CONTROL ASSY.
PCB FOR AMU CONTROL PANEL
ID 94-MA00Z26876
$ 1,018.95
In Stock 1
PIN WELDED ASY (EWBS) product photo
PIN WELDED ASY (EWBS)
VACUUM BELLOWS FOR WAFER CLAMP ASSEMBLY
ID 94-G-MA91D31644
$ 1,264.03
In Stock 1
WAFER CLAMP 8 INCH QUARTZ product photo
WAFER CLAMP 8 INCH QUARTZ
6" WAFER CLAMP FULL LIP
ID 94-MD91B25976
$ 1,710.00
In Stock 1
SAFETY RELAY RT9 24V DC COIL product photo
SAFETY RELAY RT9 24V DC COIL
24V SAFETY RELAY
ID 94-G-ESR6010
$ 456.46
In Stock 1
SLIP RING SET product photo
SLIP RING SET
CHILLER FLUID
ID 94-G-SUN-ASY-002SP
$ 1,482.46
In Stock 1
WAFER CLAMP 4 INCH QUARTZ product photo
WAFER CLAMP 4 INCH QUARTZ
4" WAFER CLAMP FULL LIP
ID 94-MD91B25973
$ 1,504.80
In Stock 1
BELLOWS WELD ASY product photo
BELLOWS WELD ASY
VACUUM BELLOW ASSEMBLY FOR PINLIFT
ID 94-MA91C19809
$ 1,640.69
In Stock 1
PTN-460-GR-08-20x77-RT product photo
PTN-460-GR-08-20x77-RT
GRAPHITE PLATEN 20X 77MM RECESES
ID 94-G-MD84B36562
$ 2,390.91
In Stock 1
HP EliteDesk 800 G5 Small Form Factor PC product photo
HP EliteDesk 800 G5 Small Form Factor PC
Windows 10 PC to support system operating Windows XP and Windows 7
ID 94-OM1071483
For availability and prices please request a quote.
AMU VAC CAP ASY product photo
AMU VAC CAP ASY
VAC CAP RIE/PECVD AMU
ID 94-MA00A23771
$ 17,395.13
In Stock 1
VLV CONTR LN2 product photo
VLV CONTR LN2
LN2 CONTROL VALVE
ID 94-GVV0560
$ 694.62
In Stock 1
MOTOR/GEARBOX ASY product photo
MOTOR/GEARBOX ASY
AMU CAPACITOR DRIVE MOTOR/GEARBOX
ID 94-MA00D23738
$ 1,709.89
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