Oxford Instruments spare parts, consumables and accessories for a variety of applications

AMU AIR VANE 5 TURN COIL ASY

AIR VANE VAC RIE/PECVD AMU

ID 94-MA00A19400

£ 13,939.00

AMU VAC CAP ASY

VAC CAP RIE/PECVD AMU

ID 94-MA00A23771

£ 17,415.29

BEARING GUIDE RND SHAFT

ION BEAM PLATEN CLAMP BEARINGS

ID 94-MA31C25229

£ 1,537.97

BELLOWS WELD ASSEMBLY

8" WAFER CLAMP FULL LIP

ID 94-G-MA91D29176

£ 1,362.57

BELLOWS WELD ASSEMBLY

VACUUM BELLOW ASSEMBLY FOR PINLIFT

ID 94-MA91C19809

£ 1,411.43

Blade for G/VAC/VLV/940

BLADE FOR MONOVAT SEAL KIT VITON 50X336 02112-BA24

ID 94-G-VAC-VLV-941

£ 1,237.56

CATHODE TI FBN

ION SOURCE FILAMENT

ID 94-G-MD31C39373

£ 930.90

FILAMENT HPN

ION SOURCE FILAMENT

ID 94-MA00D27078

£ 49.94

FILTER UV/RF

Filter for chamber viewpoints

ID 94-MD81D14211

£ 76.67

GGE ACT INVERT MAG AIM-S-NW25

PENNING GAUGE

ID 94-G-VAC-GGE-004

£ 889.09

GLASS WINDOW 51x6MM THK PYREX

CHAMBER VIEWPORT

ID 94-M-0651D-01

£ 2.76

H5 Thermal (10L) Fluid

Thermal bath fluids have been carefully selected and proven in long-term service. They are suited for use with heated and refrigerated circulators.

ID 94-G-WTR-SUN-903

£ 1,436.40

MKS 640 PRES.CTRL 50TORR

He 640 PRESSURE CONTROLLER 50TORR

ID 94-L-MTR-PRE-002

£ 2,357.64

MOTOR/GEARBOX ASY

AMU CAPACITOR DRIVE MOTOR/GEARBOX

ID 94-MA00D23738

£ 1,944.62

O'RING BS112 VIT 2.62x12.37MM

O'RING FOR ELECTRODE LEGS

ID 94-G-SEL-O-V-112

£ 1.00

O'RING BS472 VIT 6.99x582.68MM

O'RING FOR ELECTRODE

ID 94-G-SEL-O-V-472C

£ 50.73

PCB AMU Control Assembly

PCB FOR AMU CONTROL PANEL

ID 94-MA00Z26876

£ 1,026.00

PIN WELDED ASY (EWBS)

VACUUM BELLOWS FOR WAFER CLAMP ASSEMBLY

ID 94-G-MA91D31644

£ 1,096.57

PLG TABLE TOP ELECTR LWR

Electrode coverplate plugs

ID 94-G-MD40511

£ 32.18

PSU 24V/+15V/-15V

LAMBDA POWER SUPPLY UNIT - 24V/+15V/-15V

ID 94-EXP1524

£ 617.74

PTN-460-GR-08-20x77-RT

GRAPHITE PLATEN 20X 77MM RECESES

ID 94-G-MD84B36562

£ 1,623.18

SAFETY RELAY RT9 24V DC COIL

24V SAFETY RELAY

ID 94-G-ESR6010

£ 402.84

SEAL KIT FOR G/VAC/VLV/930

BLADE FOR MONOVAT SEAL KIT VITON 46x236 02010-BA24

ID 94-G-VAC-VLV-932

£ 1,047.40

SHOWERHEAD RIE STD

STANDARD RIE SHOWERHEAD

ID 94-MD84A16659

£ 1,912.26

SIGHT GLASS

LEP TOP CHAMBER SIGHT GLASS

ID 94-MD81D16402

£ 60.68

SLIP RING SET

SLIP RING PCB AND CONTACTS

ID 94-G-SUN-ASY-002SP

£ 2,206.57

Thermal G Bath Fluid (10 Ltr)

JULABO Thermal G is a bath fluid based on water-glycol and features excellent thermal properties. 30...+80°C Working Temperature. In addition, JULABO Thermal G supplies anti-freeze protection and thus it is most suitable for applications below the freezing point of water.

ID 94-G-WTR-SUN-909

£ 336.30

TUBE ALUMINA ICP65

ICP 65 TUBE

ID 94-MD00C26550

£ 1,636.45

Vacuum Capacitor AMU

Upgrading to latest AMU will include a firmware update and replacement of all parts. There will be a reduction in system failures, resulting in a decrease in cost of overall ownership of the system.

The Vac cap AMU design has eliminated any arching possibility and will improve MTBF for air vane configured tools.

ID 94-KT1011727

For availability and prices please request a quote.