Ion Beam New User Training

For new members of your team or those unfamiliar with system software.

For availability and prices please request a quote.
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Oxford Instruments training manager or accredited trainer to conduct training on the customer system for up to 6 persons. The course can also be done using tool emulation software in Oxford Instruments Plasma Technology UK Headquarters. Course includes both classroom and cleanroom instruction and will normally last 2 days. 

For new members of your team or those unfamiliar with system software. You'll learn:

• Checking system services, internal power supplies, etc
• Start up and shut down procedures for the system
• Location of the main hardware components, including the EN13849 safety relays
• Hard drive layout - Locating the system log files/diagnostic software log files/test documents
• Setting user login levels – Limiting access - assigning facilities
• Pumping page - Explanation of the layout
• Process page - Explanation of the layout
• System software messages and alarms
• Service mode – when, and when not to use (examples of pumping/gauge fault diagnosis)
• System health checks – Fill rates, Leak up rates, Handling tests, Plasma test, RF matching
• Using the log viewer to view basic system health and process trends
• Using TeamViewer to access support services

The course can be adapted to suit the background, experience and needs of those attending.

Please note: This course is not bookable online. Please raise a quote request for more information, availability and prices and someone will get back to you within 2 working days. 

The course content is adapted to the needs and experience of those attending and includes:Health and safety working on and around the tool, Plasma etching and deposition, System overview and examination of internal components Fault finding, troubleshooting and Preventative Maintenance ( Theory and Practical) are the main topics. 
The courses are held either at our UK headquarters or at your premises, utilising your own Oxford Instruments systems.

Key Benefits of Training

To provide new and existing users with the knowledge required to undertake basic maintenance and fault diagnosis maximising system uptime and increasing self-sufficiency. To assist news users to rapidly come up to speed on the correct use of the tool software, minimising the risk to the equipment.


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