Plasma Platforms Equipment Training

Examine and explore, in detail, the various hardware blocks, software diagnostic options and electrical schematics of your system.
For availability and prices please request a quote.


COURSE NAME: Plasma Systems Equipment Training

Using a PlasmaPro training system, explore the various system hardware and mechanical assemblies in a risk-free environment. You'll learn:

  • Benchmark tool performance prior to maintenance
  • How to carry out essential skills, such as returning of the AMU
  • How to recognise and isolate hardware issues using service mode
  • Appreciate the interlock scheme and interpreting alarm signals appropriately

Please note: This course is not bookable online. Please raise a quote request for more information, availability and prices and someone will get back to you within 2 working days.

This course content is adapted to the needs and experience of those attending and includes:Health and safety working on and around the tool, Plasma etching and deposition, System overview and examination of internal components Fault finding, troubleshooting and Preventative Maintenance ( Theory and Practical) are the main topics. The courses are held either at our UK headquarters or at your premises, utilising your own Oxford Instruments systems.

Key Benefits of Training

To provide new and existing users with the knowledge required to undertake basic maintenance and fault diagnosis maximising system uptime and increasing self-sufficiency. To assist news users to rapidly come up to speed on the correct use of the tool software, minimising the risk to the equipment.

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