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MKS 640 PRES.CTRL 50TORR product photo
MKS 640 PRES.CTRL 50TORR
He 640 PRESSURE CONTROLLER 50TORR
ID 94-L-MTR-PRE-002
$ 3,534.01
Pre Order Now
Vacuum Capacitor AMU product photo
Vacuum Capacitor AMU
 
Upgrading to latest AMU will include a firmware update and replacement of all parts. There will be a reduction in system failures, resulting in a decrease in cost of overall ownership of the system.

The Vac cap AMU design has eliminated any arching possibility and will improve MTBF for air vane configured tools.
ID 94-KT1011727
N/A
BELLOWS WELD ASY product photo
BELLOWS WELD ASY

8" WAFER CLAMP FULL LIP


ID 94-G-MA91D29176
$ 1,602.38
Pre Order Now
AMU AIR VANE 5 TURN COIL ASY product photo
AMU AIR VANE 5 TURN COIL ASY

AIR VANE VAC RIE/PECVD AMU
ID 94-MA00A19400
$ 8,656.77
Pre Order Now
FILTER UV/RF product photo
FILTER UV/RF

FILTER FOR CHAMBER VIEWPORTS



ID 94-MD81D14211
$ 68.17
Pre Order Now
PSU 24V/+15V/-15V product photo
PSU 24V/+15V/-15V

LAMBDA POWER SUPPLY

24V/+15V/-15V




ID 94-EXP1524
$ 812.77
Pre Order Now
Thermal G (10L) Julabo product photo
Thermal G (10L) Julabo

Thermal bath fluids have been carefully selected and proven in long-term service. They are suited for use with heated and refrigerated circulators.

ID 94-G-WTR-SUN-903
$ 1,583.23
Pre Order Now
BEARING GUIDE RND SHAFT product photo
BEARING GUIDE RND SHAFT
ION BEAM PLATEN CLAMP BEARINGS
ID 94-MA31C25229
$ 2,050.22
Pre Order Now
FILAMENT HPN product photo
FILAMENT HPN

ION SOURCE FILAMENT
ID 94-MA00D27078
$ 2.37
Pre Order Now
SHOWERHEAD RIE STD product photo
SHOWERHEAD RIE STD
STANDARD RIE SHOWERHEAD
ID 94-MD84A16659
$ 2,211.59
Pre Order Now
GGE ACT INVERT MAG AIM-S-NW25 product photo
GGE ACT INVERT MAG AIM-S-NW25
PENNING GAUGE
ID 94-G-VAC-GGE-004
$ 1,322.40
Pre Order Now
TUBE ALUMINA ICP65 product photo
TUBE ALUMINA ICP65
ICP 65 TUBE
ID 94-MD00C26550
$ 1,413.59
Pre Order Now
O'RING BS112 VIT 2.62x12.37MM product photo
O'RING BS112 VIT 2.62x12.37MM
O'RING FOR ELECTRODE LEGS
ID 94-G-SEL-O-V-112
$ 0.55
Pre Order Now
PLG TABLE TOP ELECTR LWR product photo
PLG TABLE TOP ELECTR LWR
ELECTRODE COVERPLATE PLUGS
ID 94-G-MD40511
$ 39.90
Pre Order Now
GLASS WINDOW 51x6MM THK PYREX product photo
GLASS WINDOW 51x6MM THK PYREX

CHAMBER VIEWPORT
ID 94-M-0651D-01
$ 19.84
Pre Order Now
Thermal G Bath Fluid (10 Ltr) product photo
Thermal G Bath Fluid (10 Ltr)
JULABO Thermal G is a bath fluid based on water-glycol and features excellent thermal properties. 30...+80°C Working Temperature. In addition, JULABO Thermal G supplies anti-freeze protection and thus it is most suitable for applications below the freezing point of water.

 

ID 94-G-WTR-SUN-909
$ 470.05
Pre Order Now
HEXID A4 5 LITRE product photo
HEXID A4 5 LITRE
CHILLER FLUID
ID 94-G-WTR-SUN-007
$ 164.16
Pre Order Now
WAFER CLAMP 6 INCH QUARTZ product photo
WAFER CLAMP 6 INCH QUARTZ
CONTACTS FOR IONBEAM PLATEN
ID 94-MD91B25974
$ 1,322.40
Pre Order Now
SEAL KIT FOR G/VAC/VLV/930 product photo
SEAL KIT FOR G/VAC/VLV/930
BLADE FOR MONOVAT SEAL KIT VITON 46x236 02010-BA24
ID 94-G-VAC-VLV-932
$ 1,208.40
Pre Order Now
O'RING BS472 VIT 6.99x582.68MM product photo
O'RING BS472 VIT 6.99x582.68MM
O'RING FOR ELECTRODE
ID 94-G-SEL-O-V-472C
$ 56.32
Pre Order Now
SIGHT GLASS product photo
SIGHT GLASS
LEP TOP CHAMBER SIGHT GLASS
ID 94-MD81D16402
$ 114.00
Pre Order Now
BLADE FOR G/VAC/VLV/940 product photo
BLADE FOR G/VAC/VLV/940
BLADE FOR MONOVAT SEAL KIT VITON 50X336 02112-BA24
ID 94-G-VAC-VLV-941
$ 1,276.80
Pre Order Now
CATHODE TI FBN product photo
CATHODE TI FBN

ION SOURCE FILAMENT
ID 94-G-MD31C39373
$ 1,155.73
Pre Order Now
PCB AMU CONTROL ASSY. product photo
PCB AMU CONTROL ASSY.
PCB FOR AMU CONTROL PANEL
ID 94-MA00Z26876
$ 1,018.95
Pre Order Now
PIN WELDED ASY (EWBS) product photo
PIN WELDED ASY (EWBS)
VACUUM BELLOWS FOR WAFER CLAMP ASSEMBLY
ID 94-G-MA91D31644
$ 1,264.03
Pre Order Now
WAFER CLAMP 8 INCH QUARTZ product photo
WAFER CLAMP 8 INCH QUARTZ
6" WAFER CLAMP FULL LIP
ID 94-MD91B25976
$ 1,710.00
Pre Order Now
SAFETY RELAY RT9 24V DC COIL product photo
SAFETY RELAY RT9 24V DC COIL
24V SAFETY RELAY
ID 94-G-ESR6010
$ 456.46
Pre Order Now
SLIP RING SET product photo
SLIP RING SET
CHILLER FLUID
ID 94-G-SUN-ASY-002SP
$ 1,482.46
Pre Order Now
WAFER CLAMP 4 INCH QUARTZ product photo
WAFER CLAMP 4 INCH QUARTZ
4" WAFER CLAMP FULL LIP
ID 94-MD91B25973
$ 1,504.80
Pre Order Now
BELLOWS WELD ASY product photo
BELLOWS WELD ASY
VACUUM BELLOW ASSEMBLY FOR PINLIFT
ID 94-MA91C19809
$ 1,640.69
Pre Order Now
PTN-460-GR-08-20x77-RT product photo
PTN-460-GR-08-20x77-RT
GRAPHITE PLATEN 20X 77MM RECESES
ID 94-G-MD84B36562
$ 2,390.91
Pre Order Now
HP EliteDesk 800 G5 Small Form Factor PC product photo
HP EliteDesk 800 G5 Small Form Factor PC
Windows 10 PC to support system operating Windows XP and Windows 7
ID 94-OM1071483
N/A
AMU VAC CAP ASY product photo
AMU VAC CAP ASY
VAC CAP RIE/PECVD AMU
ID 94-MA00A23771
$ 17,395.13
Pre Order Now
VLV CONTR LN2 product photo
VLV CONTR LN2
LN2 CONTROL VALVE
ID 94-GVV0560
$ 694.62
Pre Order Now
MOTOR/GEARBOX ASY product photo
MOTOR/GEARBOX ASY
AMU CAPACITOR DRIVE MOTOR/GEARBOX
ID 94-MA00D23738
$ 1,709.89
Pre Order Now
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