Plasma Systems Handler Training

OITR31
You'll look at the the MMX and EMS training system robots – emphasis will be on tuition and practice in a controlled environment.

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Description

COURSE NAME: Handler Training

Held at our Plasma Technology Headquarters or your site, you'll look at the Brooks MMX, Hine or EMS platforms.
This course is ideal for maintenance and equipment engineers.

You'll learn:

  • How to rectify wafer placement errors and reset the handling using the hand pendant
  • Basics setup routines
  • Wafer size changes
  • Elevator configuration and set up
Please note: This course is not bookable online. Please raise a quote request for more information, availability and prices and someone will get back to you within 2 working days. 

The course content is adapted to the needs and experience of those attending and includes:Health and safety working on and around the tool, Plasma etching and deposition, System overview and examination of internal components Fault finding, troubleshooting and Preventative Maintenance ( Theory and Practical) are the main topics. 
The courses are held either at our UK headquarters or at your premises, utilising your own Oxford Instruments systems.

Key Benefits of Training

To provide new and existing users with the knowledge required to undertake basic maintenance and fault diagnosis maximising system uptime and increasing self-sufficiency. To assist news users to rapidly come up to speed on the correct use of the tool software, minimising the risk to the equipment.


 

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