Nanolithography

Tip Coating

• Diamond(1)

• 5nm Ti / 40nm Pt(2)
• CoCr(2)
• None(8)
• Pt(1)
• PtSi(3)
• Ti/Ir(2)
• Ti/Pt(1)

Tip Shape

cone cone(1)

Tip Radius

• 10.0(1)

Tip Height

300.0 300.0(1)

Reflex Coating

Cr/Au Cr/Au(1)

Applications

• Energy Storage(1)
• Piezoelectrics / Ferroelectrics(1)
• Semiconductors / Microelectronics(1)
• Solar / Photovoltaics(1)
• Thin Films(1)

Manufacturer

• Adama Innovations(1)

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