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PLASMA TECHNOLOGY

    • PRODUCTS(32)
    • GENERAL CONSUMABLES(6)
    • MICROSCOPY SUPPLIES(2)
    • SYSTEM SPARES(32)
    • PLASMA TECHNOLOGY(32)
    • AMU(4)
    • Assemblies(6)
    • Electrical(4)
    • Electrodes(2)
    • Fasteners & Fixings(1)
    • Fittings(1)
    • Gauges/MFCs(1)
    • Handling(3)
    • Mechanical(24)
    • Miscellaneous(3)
    • Motors(1)
    • OEM(1)
    • PC Component(1)
    • Pneumatics(1)
    • Power supply(1)
    • Switches(1)
    • Upgrade(1)
    • Vacuum(2)
    • Valves(3)
    32 list items
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    MKS 640 PRES.CTRL 50TORR product photo
    MKS 640 PRES.CTRL 50TORR
    He 640 PRESSURE CONTROLLER 50TORR
    ID 94-L-MTR-PRE-002
    $ 2,995.00
    In Stock 1
    Vacuum Capacitor AMU product photo
    Vacuum Capacitor AMU
     
    Upgrading to latest AMU will include a firmware update and replacement of all parts. There will be a reduction in system failures, resulting in a decrease in cost of overall ownership of the system.

    The Vac cap AMU design has eliminated any arching possibility and will improve MTBF for air vane configured tools.
    ID 94-KT1011727
    For availability and prices please request a quote.
    BELLOWS WELD ASSEMBLY product photo
    BELLOWS WELD ASSEMBLY

    PINLIFT BELLOWS WELDED ASSEMBLY


    ID 94-G-MA91D29176
    $ 1,730.46
    In Stock 1
    AMU AIR VANE 5 TURN COIL ASY product photo
    AMU AIR VANE 5 TURN COIL ASY

    AIR VANE VAC RIE/PECVD AMU
    ID 94-MA00A19400
    $ 19,514.60
    In Stock 1
    FILTER UV/RF product photo
    FILTER UV/RF

    Filter for chamber viewpoints



    ID 94-MD81D14211
    $ 107.34
    In Stock 1
    PSU 24V/+15V/-15V product photo
    PSU 24V/+15V/-15V

    LAMBDA POWER SUPPLY UNIT  - 24V/+15V/-15V


    ID 94-EXP1524
    $ 783.60
    In Stock 2
    H5 Thermal (10L) Fluid product photo
    H5 Thermal (10L) Fluid

    Thermal bath fluids have been carefully selected and proven in long-term service. They are suited for use with heated and refrigerated circulators.

    ID 94-G-WTR-SUN-903
    $ 1,823.72
    In Stock 1
    BEARING GUIDE RND SHAFT product photo
    BEARING GUIDE RND SHAFT
    ION BEAM PLATEN CLAMP BEARINGS
    ID 94-MA31C25229
    $ 1,952.46
    In Stock 2
    FILAMENT HPN product photo
    FILAMENT HPN

    ION SOURCE FILAMENT
    ID 94-MA00D27078
    $ 63.42
    In Stock 1
    SHOWERHEAD RIE STD product photo
    SHOWERHEAD RIE STD
    STANDARD RIE SHOWERHEAD
    ID 94-MD84A16659
    $ 2,428.57
    In Stock 1
    GGE ACT INVERT MAG AIM-S-NW25 product photo
    GGE ACT INVERT MAG AIM-S-NW25
    PENNING GAUGE
    ID 94-G-VAC-GGE-004
    $ 1,129.00
    In Stock 1
    TUBE ALUMINA ICP65 product photo
    TUBE ALUMINA ICP65
    ICP 65 TUBE
    ID 94-MD00C26550
    $ 2,078.29
    In Stock 1
    O'RING BS112 VIT 2.62x12.37MM product photo
    O'RING BS112 VIT 2.62x12.37MM
    O'RING FOR ELECTRODE LEGS
    ID 94-G-SEL-O-V-112
    $ 1.40
    In Stock 2
    PLG TABLE TOP ELECTR LWR product photo
    PLG TABLE TOP ELECTR LWR
    Electrode coverplate plugs
    ID 94-G-MD40511
    $ 45.05
    In Stock 8
    Thermal G Bath Fluid (10 Ltr) product photo
    Thermal G Bath Fluid (10 Ltr)
    JULABO Thermal G is a bath fluid based on water-glycol and features excellent thermal properties. 30...+80°C Working Temperature. In addition, JULABO Thermal G supplies anti-freeze protection and thus it is most suitable for applications below the freezing point of water.

     

    ID 94-G-WTR-SUN-909
    $ 470.82
    In Stock 1
    WAFER CLAMP 6 INCH QUARTZ product photo
    WAFER CLAMP 6 INCH QUARTZ
    WAFER CLAMP 6" QUARTZ SERIES ll
    ID 94-MD91B25974
    $ 2,942.29
    Pre Order Now
    SEAL KIT FOR G/VAC/VLV/930 product photo
    SEAL KIT FOR G/VAC/VLV/930
    BLADE FOR MONOVAT SEAL KIT VITON 46x236 02010-BA24
    ID 94-G-VAC-VLV-932
    $ 1,330.20
    In Stock 1
    O'RING BS472 VIT 6.99x582.68MM product photo
    O'RING BS472 VIT 6.99x582.68MM
    O'RING FOR ELECTRODE
    ID 94-G-SEL-O-V-472C
    $ 71.02
    In Stock 2
    SIGHT GLASS product photo
    SIGHT GLASS
    LEP TOP CHAMBER SIGHT GLASS
    ID 94-MD81D16402
    $ 84.95
    In Stock 1
    BLADE FOR G/VAC/VLV/940 product photo
    BLADE FOR G/VAC/VLV/940
    BLADE FOR MONOVAT SEAL KIT VITON 50X336 02112-BA24
    ID 94-G-VAC-VLV-941
    $ 1,571.17
    In Stock 1
    CATHODE TI FBN product photo
    CATHODE TI FBN
    ION SOURCE FILAMENT
    ID 94-G-MD31C39373
    $ 1,182.24
    In Stock 1
    PCB AMU Control Assembly product photo
    PCB AMU Control Assembly
    PCB FOR AMU CONTROL PANEL
    ID 94-MA00Z26876
    $ 1,436.40
    In Stock 1
    PIN WELDED ASY (EWBS) product photo
    PIN WELDED ASY (EWBS)
    VACUUM BELLOWS FOR WAFER CLAMP ASSEMBLY
    ID 94-G-MA91D31644
    $ 1,392.64
    In Stock 1
    WAFER CLAMP 8 INCH QUARTZ product photo
    WAFER CLAMP 8 INCH QUARTZ
    6" WAFER CLAMP FULL LIP
    ID 94-MD91B25976
    $ 3,642.85
    In Stock 1
    SAFETY RELAY RT9 24V DC COIL product photo
    SAFETY RELAY RT9 24V DC COIL
    24V SAFETY RELAY
    ID 94-G-ESR6010
    $ 511.60
    In Stock 1
    SLIP RING SET product photo
    SLIP RING SET
    SLIP RING PCB AND CONTACTS
    ID 94-G-SUN-ASY-002SP
    $ 2,802.00
    In Stock 1
    WAFER CLAMP 4 INCH QUARTZ product photo
    WAFER CLAMP 4 INCH QUARTZ
    4" WAFER CLAMP FULL LIP
    ID 94-MD91B25973
    $ 3,338.83
    In Stock 1
    BELLOWS WELD ASSEMBLY product photo
    BELLOWS WELD ASSEMBLY

    VACUUM BELLOW ASSEMBLY FOR PINLIFT

    ID 94-MA91C19809
    $ 1,792.56
    In Stock 1
    PTN-460-GR-08-20x77-RT product photo
    PTN-460-GR-08-20x77-RT
    GRAPHITE PLATEN 20X 77MM RECESES
    ID 94-G-MD84B36562
    $ 2,061.43
    In Stock 1
    AMU VAC CAP ASY product photo
    AMU VAC CAP ASY
    VAC CAP RIE/PECVD AMU
    ID 94-MA00A23771
    $ 22,117.41
    In Stock 1
    VLV CONTR LN2 product photo
    VLV CONTR LN2
    LN2 CONTROL VALVE
    ID 94-GVV0560
    $ 1,283.60
    In Stock 1
    MOTOR/GEARBOX ASY product photo
    MOTOR/GEARBOX ASY
    AMU CAPACITOR DRIVE MOTOR/GEARBOX
    ID 94-MA00D23738
    $ 2,469.66
    In Stock 1
    32 list items
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